Standard
Optics
Heraeus Quarzglas offers a wide product range of
high quality quartz glass. We produce custom
tailored or standardized products for your
optical applications be it from deep UV to
Infrared or if you are essentially
interested in the thermal, chemical or
mechanical properties of fused quartz or fused
silica.
In addition to standard geometries or standard
specifications we offer products custom tailored
to your needs. Our technical and scientific
experience is at your disposal for your tasks at
hand.
Our customized Quartz Glass solutions refer to
your desired geometry and/or the manufacturing
of demanding optical specifications.
|
Deep UV |
UV-VIS |
IR |
Suprasil 1/
2
(Grade A&B) |
Homosil 101 |
Infrasil 301 |
Suprasil 311
Suprasil 312 |
Herasil 102 |
Infrasil 302 |
| |
Herasil 3 |
Infrasil 303 |
|
Suprasil 300 |
|
HOQ 310 |
|
Microlithography
Heraeus Quarzglas develops, manufactures and
distributes products from synthetic fused silica
for high-tech applications within the optical
microlithography, for:
Projection optics
SUPRASIL
311 and SUPRASIL 401 are high-purity synthetic
fused silica grades, produced by flame
hydrolysis. They show excellent physical
properties and fulfill highest requirements on
optical quality from the deep UV to the near
infrared region. The most outstanding attribute
of projection optics, which produces the tiny
structures of modern semiconductor microchips,
is the high degree of optical homogeneity in all
three dimensions.
SUPRASIL 311 and SUPRASIL 401 are specially
designed for the use in 248 nm and 193 nm
projection optics. They offer an optimum of
transmission and laser resistance in the deep UV
range. Their unique characteristics display an
optimized combination of highest optical
homogeneity and distinguished laser resistance.
They show only very small induced absorption and
changes in the index of refraction
llumination optics
SUPRASIL 2 is
a high-purity synthetic fused silica grade,
produced by direct flame hydrolysis. It shows
excellent physical properties and fulfills
highest requirements on optical quality from the
deep UV to the near infrared region. SUPRASIL 2
is specially designed for the use in 248 nm and
193 nm illumination optics. It offers an optimum
of transmission and laser resistance for
applications with high energy excimer lasers.
Synthetic
fused silica from Heraeus Quarzglas is
manufactured under various production conditions
which are designed to fulfill the highest
requirements of our customers.
No bubbles and inclusions, highest optical
homogeneity and excellent transmission and laser
resistance are distinguished features of
synthetic fused silica from Heraeus.
Strong efforts in research and development
secure permanent improvements, along the ITRS =
International Technology Roadmap for
Semiconductors". These are improvements in
material properties as well as the corresponding
metrology . |
soffieria di vetro tecnico
per applicazioni industriali
